Kratos AXIS ULTRA X-ray Photoelectron Spectrometer
Description
Kratos AXIS ULTRA X-ray Photoelectron Spectrometer offers advanced capability of high sensitivity, high energy resolution and high lateral resolution image analyses.
Technical Characteristics
- Sampling Depths: <10 nm and variable with ARXPS
- Spectroscopy: large area analysis: 300x700 μm and small areas analysis 100-15 μm
- Imaging: parallel and real-time, FOV (200-700 μm), and lateral resolution: <5 μm
- X-ray sources: dual anode: Mg and monochromatic Al
- Ion source: sputtering and cleaning samples
Other Characteristics
General:
- Identification of all elements (except H and He) present in the outermost 10 nm of a surface in concentrations > 0.1 atomic %
- High energy resolution: information about the molecular environment (oxidation state, bonding atoms, etc.)
- Quantitative: determination of elemental surface composition (2% or better)
Fast parallel imaging:
- Information on lateral variation in composition (spatial resolution down to 5 μm)
- Real-time parallel detection that allows high quality chemical images to be obtained in only a few seconds
- Multispectral image acquisitions combine high energy resolution and high spatial resolution allowing analysis of lateral distribution of chemical states
Multi-point spectroscopy:
- The incorporated electrostatic deflection system allows easy multi-point analysis to be carried out from within the imaged field of view without translating the sample
- Small area analysis from down to 15μm areas by conventional experiments
Depth profiling:
- Non-destructive depth profiling using Angle-Resolved XPS in outer 10nm
- Destructive depth profiling several hundreds of nm into the sample
- Ion gun for in-situ sample cleaning
Location
AML 273
User Rates
| Internal | $60/hour |
| External Academic | $90/hour |
| External Industry | $120/hour |
| Data Analysis | $75/hour |
Scheduling
To schedule time on this instrument or to learn more about its capabilities and user fees, etc. please contact:
Angelica Benavidez
Research Assistant Professor, Center for Micro Engineered Materials, Chemical & Biological Engineering
505-277-2304
asanch18@unm.edu